SM5491 Datasheet | Silicon Microstructures

Low Pressure Digital & Analog Sensor SM5291, SM5391, SM5491 Gauge and Differential Pressure Sensor DESCRIPTION The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature pensated outputs. This series provides JEDEC standard SOIC-16 package with a dual vertical or horizontal ports options. It is available in gauge, differential, asymmetric differential configurations. With the dual porting, a reference measurement is possible to minimize errors due to changes in ambient pressure. Features - Pressure...