Part SM6295
Description Low Pressure Sensor
Manufacturer Silicon Microstructures
Size 651.74 KB
Silicon Microstructures
SM6295

Overview

The SM6295-BCM-S-040-000 is an amplified analog, low pressure MEMS sensor offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce an analog, fully conditioned, pressure and temperature compensated sensor in a JEDEC standard SOIC-16 package with dual vertical porting. It is available in a gage pressure configuration.

  • Pressure range from 0 to 40 cmH2O
  • 5.0 V operation
  • Amplified analog output (10 to 90%Vdd)
  • Compensated temperature range: 0 to 60oC
  • Gage pressure configuration
  • Insensitive to mounting orientation
  • Pressurized from backside to protect topside electronics