SM97A Datasheet PDF - Silicon Microstructures Absolute Pressure Sensor Specs

SM97A - Absolute Pressure Sensor

Datasheet Summary

Description

The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip.

The SM97A is designed for harsh media where absolute pressure needs to be accurately measured.

In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
Support up to 25 times FS Burst Pressure.
Integrated temperature sensor.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
90 Millivolt output at 5 V.
All-silicon construction.
Backside metal for eutectic bonding is available as an option.
Proprietary design for enhanced proof & burst pressure robustness.

Datasheet Details

Part number	SM97A
Manufacturer	Silicon Microstructures
File Size	639.83 KB
Description	Absolute Pressure Sensor
Datasheet	SM97A Datasheet
Additional preview pages of the SM97A datasheet.

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Full PDF Text Transcription

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SM97A Harsh Media Backside Absolute Pressure Series SM97A Series FEATURES • Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA) • Support up to 25 times FS Burst Pressure • Integrated temperature sensor • Small die (1.2 mm x 1.33 mm) • Backside entry for harsh environments • 90 Millivolt output at 5 V • All-silicon construction • Backside metal for eutectic bonding is available as an option • Proprietary design for enhanced proof & burst pressure robustness DESCRIPTION The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.

Published: Aug 21, 2020 |