SM97A Overview
The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only es in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. This results in a durable pressure sensor suitable for challenging
SM97A Key Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
- Support up to 25 times FS Burst Pressure
- Integrated temperature sensor
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- 90 Millivolt output at 5 V
- All-silicon construction
- Backside metal for eutectic bonding is available as an option
- Proprietary design for enhanced proof & burst pressure robustness