SM97A Datasheet | Silicon Microstructures

SM97A Harsh Media Backside Absolute Pressure Series SM97A Series Features - Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA) - Support up to 25 times FS Burst Pressure - Integrated temperature sensor - Small die (1.2 mm x 1.33 mm) - Backside entry for harsh environments - 90 Millivolt output at 5 V - All-silicon construction - Backside metal for eutectic bonding is available as an option - Proprietary design for enhanced proof & burst pressure robustness DESCRIPTION The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips...