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SM97A - Absolute Pressure Sensor

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SM97A Absolute Pressure Sensor by Silicon Microstructures - Datasheet Preview — Datasheet preview – SM97A

Datasheet Details

Part number	SM97A
Manufacturer	Silicon Microstructures
File Size	639.83 KB
Description	Absolute Pressure Sensor
Datasheet	SM97A Datasheet
Additional preview pages of the SM97A datasheet.

Product details

Description

The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
Support up to 25 times FS Burst Pressure.
Integrated temperature sensor.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
90 Millivolt output at 5 V.
All-silicon construction.
Backside metal for eutectic bonding is available as an option.
Proprietary design for enhanced proof & burst pressure robustness.

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Published: Aug 21, 2020 |