SM98A
SM98A is Backside Absolute Pressure Sensor manufactured by Silicon Microstructures.
SM98A Harsh Media Backside Absolute Pressure Series
SM98A Series
Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
- On-Board temperature sensing diode
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- Backside metal option for eutectic bonding
- 80 Millivolt output at 5V
- All-silicon construction
- 50 Bar version in development
TYPICAL APPLICATIONS
- Selective catalytic reduction (SCR)
- Oil Pressure
- Automotive transmission
- Automotive exhaust gas
- TMAP
- Truck tire pressure
- Medical fluid or gas pressure sensing
Silicon Microstructures, Inc. 2001-2017. All rights reserved DOC # 40DS9801.07
DESCRIPTION
The SM98A is a silicon micro-machined,...
