SM98A Description
The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only es in contact with silicon materials.
SM98A Key Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
- On-Board temperature sensing diode
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- Backside metal option for eutectic bonding
- 80 Millivolt output at 5V
- All-silicon construction
- 50 Bar version in development