Silicon Microstructures SM98A
The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. This results in a durable pressure sensor suitable for challenging applications.| Part No. | SM98A |
|---|---|
| Datasheet | SM98A Download |
| Manufacturer | Silicon Microstructures |
| Description | Backside Absolute Pressure Sensor |
| Buy | Stock & Price |
FEATURES
● Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)● On-Board temperature sensing diode
● Small die (1.2 mm x 1.33 mm)
● Backside entry for harsh environments
● Backside metal option for eutectic bonding
● 80 Millivolt output at 5V
● All-silicon construction
● 50 Bar version in development
TYPICAL APPLICATIONS
● Selective catalytic reduction (SCR)● Oil Pressure
● Automotive transmission
● Automotive exhaust gas
● TMAP
● Truck tire pressure
● Medical fluid or gas pressure sensing Silicon Microstructures, Inc. 2001-2017. All rights reserved DOC # 40DS9801.07
DESCRIPTION
In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. The family has been qualified using AEC-Q100 Level 0 Automotive standards. This device is available in a full-scale range of 10 Bar and 20 Bar absolute (145 and 280 PSIA) and is ideal for OEM and highvolume applications.
