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SM98A - Backside Absolute Pressure Sensor

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SM98A Backside Absolute Pressure Sensor by Silicon Microstructures - Datasheet Preview — Datasheet preview – SM98A

Datasheet Details

Part number	SM98A
Manufacturer	Silicon Microstructures
File Size	481.71 KB
Description	Backside Absolute Pressure Sensor
Datasheet	SM98A Datasheet
Additional preview pages of the SM98A datasheet.

Product details

Description

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
On-Board temperature sensing diode.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
Backside metal option for eutectic bonding.
80 Millivolt output at 5V.
All-silicon construction.
50 Bar version in development.

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Published: Aug 21, 2020 |