Part SM98A
Description Backside Absolute Pressure Sensor
Manufacturer Silicon Microstructures
Size 481.71 KB
Silicon Microstructures

SM98A Overview

Description

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured.

Key Features

  • Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
  • On-Board temperature sensing diode
  • Small die (1.2 mm x 1.33 mm)
  • Backside entry for harsh environments
  • Backside metal option for eutectic bonding