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IIM-20670 - 6-axis MotionTracking MEMS Device

General Description

The IIM-20670 is a SmartIndustrial™ 6-axis MotionTracking device that combines a 3-axis gyroscope and a 3-axis accelerometer in a small plastic package.

Key Features

  • Six independent mechanical structures.
  • Gyroscope with programmable full scale range from ±41 dps to ±1966 dps.
  • Accelerometer with programmable full-scale range from ±2g, to ±65g.
  • Two temperature sensors.
  • 10 MHz Serial Peripheral Interface (SPI).
  • 10,000 g shock tolerant structure.
  • Low offset and sensitivity variation over temperature IIM-20670 includes on-chip 16-bit ADCs, programmable digital filters, and an embedded temperature.

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IIM-20670 Datasheet SmartIndustrial™ 6-axis MotionTracking® MEMS Device for Industrial Applications GENERAL DESCRIPTION The IIM-20670 is a SmartIndustrial™ 6-axis MotionTracking device that combines a 3-axis gyroscope and a 3-axis accelerometer in a small plastic package. By leveraging its patented and volume-proven CMOS-MEMS fabrication platform, InvenSense has driven the package size down to a footprint and thickness of 4.5x4.5x1.1 mm3 (24-pin DQFN), to offer fully integrated, high performance component in a compact form factor.