Description
TriQuint’s TQPED process is based on our production-released 0.5 µm TQPHT process.
TQPED partners an E-Mode pHEMT device with our TQPHT D-Mode transistors to be the first foundry pHEMT process to integrate E-Mode and D-Mode transistors on the same wafer.
Features
- Metal 2 Dielectric Metal 2 - 4um
TQPED.
- Dielectric Metal 1 - 2um
Metal 1
Metal 1 Dielectric
MIM Metal
NiCr
Nitride N+ Pseudomorphic Channel
Metal 0
Isolation Implant Isolation Implant MIM Capacitor NiCr Resistor
E-Mode / D-Mode
pHEMT
Semi-Insulating GaAs Substrate.
- 0.5 um pHEMT Device Cross-Section
www. DataSheet4U. com
E-Mode, 0.35 V, Vth D-Mode, -0.8 V Vp InGaAs Active Layer.