High Performance Bi-Directional Digital MEMS Gas F.
MFC2000 - High Performance Bi-Directional Digital MEMS Gas Flow Sensor
High Performance Bi-Directional Digital MEMS Gas Flow Sensor FEATURES Bi-directional flow (±30 or ±70SLM) High dynamic range ±3% m.v. accuracy .MFC2000 - MultiFunctional Peripheral Controller
m o .c U 4 t e e h S a at .D w w w m o .c U 4 t e MFC2000 e h S a t a .D w w w Multifunctional Peripheral Controller 2000 Hardware Description Doc. .