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RN552 - THIN FILM AMORPHOUS SILICON POSITION SENSITIVE DETECTORS

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  • such as excellent adhesion to glass substrates, precise film thickness, and hydrogen content control, which are of some interest in device design and fabrication. 1. Introduction Position-sensitive detectors, or PSDs, comprise an important class of optical sensor, producing an electrical output, either voltage or current, which utilizes the lateral photovoltaic effect to give a linear relation between the output and the location of a spot of light impinging on a semiconductor surface. This phen.

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Part number RN552
Manufacturer ETC
File Size 282.08 KB
Description THIN FILM AMORPHOUS SILICON POSITION SENSITIVE DETECTORS
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RESEARCH NEWS Thin-Film Amorphous Silicon Position-Sensitive Detectors By Jasmine Henry* and John Livingstone Optical position-sensitive detectors are a useful class of sensor with a wide range of applications in machine control systems, industrial alignment and robotic vision. They have distinct advantages over most arrayed discrete optical devices in that they can produce continuous optical signals, and versions based on thin-film amorphous silicon are not restricted by crystal growth limits and so have the potential to be fabricated in large area format. Sputter-deposited hydrogenated a-Si also has features such as excellent adhesion to glass substrates, precise film thickness, and hydrogen content control, which are of some interest in device design and fabrication. 1.
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