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FS1012 - Gas and Liquid Flow Sensor

General Description

The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle.

The FS1012 is capable of measuring a gas or liquid medium.

The FS1012 offers key advantages over resistor-based flow solutions.

Key Features

  • the sensor fully assembled and wire-bonded out to a 6-pin header. Wetted materials consist of a glass fiber reinforced PA66 resin, epoxy, and silicon carbide. Typical.

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Datasheet Details

Part number FS1012
Manufacturer IDT
File Size 270.62 KB
Description Gas and Liquid Flow Sensor
Datasheet download datasheet FS1012 Datasheet

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Full PDF Text Transcription (Reference)

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Gas and Liquid Flow Sensor Module FS1012 Datasheet Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor comprises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 features the sensor fully assembled and wire-bonded out to a 6-pin header.