FS1012 Datasheet | Renesas

FS1012 Datasheet Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor prises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In parison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 Features the sensor...