FS1012 Datasheet | IDT

Gas and Liquid Flow Sensor Module Description The FS1012 MEMS mass flow sensor module measures the flow rate using the thermo-transfer (calorimetric) principle. The FS1012 is capable of measuring a gas or liquid medium. The FS1012 offers key advantages over resistor-based flow solutions. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio. The sensor prises a “solid” thermal isolation technology and silicon-carbide coating to protect it from abrasive wear and provides robustness and long-term reliability. In parison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. The FS1012 Features the sensor fully assembled and wire-bonded out to a 6-pin header. Wetted materials consist of a glass fiber reinforced PA66 resin, epoxy, and silicon carbide. Typical Applications - Process controls and monitoring - Oil and gas leak detection - HVAC and air control systems -...