MFC2000 Description
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and embedded software capable of converting gas flow rates to a digital.
MFC2000 Key Features
- Bi-directional flow (±30 or ±70SLM)
- High dynamic range
- ±3% m.v. accuracy
- ±0.8% m.v. repeatability
- Low power consumption
- Fast response time
- Single 2.7
- 5.5Vdc power supply
- Digital I2C output
- Standard push-in fitting sizes