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D6F-50A6 Datasheet Preview

D6F-50A6 Datasheet

MEMS Airflow Sensor

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MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring
MEMS technology for precision mass
airflow measurement
• Precision mass airflow up to 50 slpm
• Stable output across full scale
• Horizontal mounting feature with *NBR ‘O’ ring option
• Compact size 78 (L) x 30 (W) x 30 (H) mm
• Low power consumption
* NBR material recommended for all applications including
medical and food processing
Application Examples
• Industrial processes
• Medical Respirators and Ventilators
• MiG and TiG welding systems
• Anesthesia Delivery
• Mass flow controllers
• Scientific / test equipment
• Fuel cell controls
Ordering Information
Model
D6F-10A5
D6F-20A5
D6F-50A5
D6F-10A6
D6F-20A6
D6F-50A6
D6F-Cable1
Case
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Thermoplastic resin / Aluminum alloy
Applicable Gas
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Air, N2O, O2
Rating
Absolute maximum rating
Item
Power-supply voltage
Output voltage
VCC
VOUT
Term
26.4
6
Flow Range
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
0 – 10 LPM
0 – 20 LPM
0 – 50 LPM
Ratings
Notes
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Right-angle Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Built-in orifice, Straight Connect
Optional (recommended)
VDC
VDC
Unit
MEMS Airflow Sensor D6F-10A, -20A, -50A
1




Omron

D6F-50A6 Datasheet Preview

D6F-50A6 Datasheet

MEMS Airflow Sensor

No Preview Available !

Electrical Performance
Recommended operation condition and DC characteristic
Item
Power-supply voltage
Operating temperature
Maximum output voltage
Minimum output voltage
VCC
TOPR
VOH
Term
VOL
Condition
VCC = 12VDC to 24VDC
IOH = 0.5mA
VCC = 12VDC to 24VDC
IOL = -0.5mA
MIN
10.8
-10
5
0
TYP
MAX
26.4
60
5.7
Unit
VDC
°C
VDC
1 VDC
Basic Performance
0 to 50 min. (Normal). L/min (Normal) volumetric flow rate at 0° C, 101 3kPa.
Measurement condition: Power-supply voltage 12 ±0.1VDC, ambient temperature 25 ±2° C and ambient air humidity 25 to 75% RH.
D6F-10A
Flow Rate L/min (normal)
Output Voltage (VDC)
D6F-20A
0
1.00 ±0.12
2
1.75 ±0.12
4
2.60 ±0.12
6
3.45 ±0.12
8
4.25 ±0.12
10
5.00 ±0.12
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
4
1.93 ±0.12
8
2.87 ±0.12
12
3.70 ±0.12
16
4.41 ±0.12
20
5.00 ±0.12
D6F-50A
Flow Rate L/min (normal)
Output Voltage (VDC)
0
1.00 ±0.12
10
2.45 ±0.12
20
3.51 ±0.12
30
4.20 ±0.12
40
4.66 ±0.12
50
5.00 ±0.12
Characteristics
Degree of Protection
Applicable Gas
Electrical Connection
Output Signal
Current Consumption
Repeat Accuracy
Insulation Resistance
Dielectric Strength
Withstand Pressure
Operating Temperature
Operating Humidity
Storage Temperature
Storage Humidity
Weight
IP40
Air
Connector (3 wire)
Analog, 1-5VDC (load resistance 10kohm min)
Max 15mA (no load, VCC = 12 to 24 VDC, VSS = GND = 0V, 25° C)
+/- 3% FSD max, 25° C
20Mohm min. (500VDC between lead terminals and case)
500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals
500 kPa
-10 to +60° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
-40 to +80° C (with no ice or dew condensation)
85%RH max. (with no ice or dew condensation)
About 103 grams
Optional: Versions for N2O and O2 also available. For Ar + CO2, He, and He + O2, please consult factory.
2 MEMS Airflow Sensor D6F-10A, -20A, -50A


Part Number D6F-50A6
Description MEMS Airflow Sensor
Maker Omron
Total Page 8 Pages
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