Datasheet Details
| Part number | SM98A |
|---|---|
| Manufacturer | Silicon Microstructures |
| File Size | 481.71 KB |
| Description | Backside Absolute Pressure Sensor |
| Datasheet |
 SM98A Datasheet
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General Description
The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.
The SM98A is designed for harsh media where absolute pressure needs to be accurately measured.
In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.
Key Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
- On-Board temperature sensing diode.
- Small die (1.2 mm x 1.33 mm).
- Backside entry for harsh environments.
- Backside metal option for eutectic bonding.
- 80 Millivolt output at 5V.
- All-silicon construction.
- 50 Bar version in development.