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Silicon Microstructures

SM98A Datasheet Preview

SM98A Datasheet

Backside Absolute Pressure Sensor

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SM98A Harsh Media
Backside Absolute Pressure Series
SM98A Series
FEATURES
Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
On-Board temperature sensing diode
Small die (1.2 mm x 1.33 mm)
Backside entry for harsh environments
Backside metal option for eutectic bonding
80 Millivolt output at 5V
All-silicon construction
50 Bar version in development
TYPICAL APPLICATIONS
Selective catalytic reduction (SCR)
Oil Pressure
Automotive transmission
Automotive exhaust gas
TMAP
Truck tire pressure
Medical fluid or gas pressure sensing
Silicon Microstructures, Inc. 2001-2017. All rights reserved
DOC # 40DS9801.07
DESCRIPTION
The SM98A is a silicon micro-machined, piezoresistive pressure-
sensing chip. The SM98A is designed for harsh media where
absolute pressure needs to be accurately measured. In contrast
to traditional pressure-sensing chips the media only comes in
contact with silicon materials. Therefore, the electronic
structures on the front side of the die will not be affected during
operation. This results in a durable pressure sensor suitable for
challenging applications. The family has been qualified using
AEC-Q100 Level 0 Automotive standards.
This device is available in a full-scale range of 10 Bar and 20 Bar
absolute (145 and 280 PSIA) and is ideal for OEM and high-
volume applications.
Provided in die form, these sensors can be mounted on ceramic
or PC board substrates as part of an OEM system. They also may
be packaged into proprietary, or application specific sensor
lines. Backside metal for eutectic bonding is available.
Dies are probed, diced, inspected, and shipped on tape. Devices
with backside metal are shipped on UV release tape.
Note: Product suitability for specific harsh environments must
be validated by the customer.
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Page 1




Silicon Microstructures

SM98A Datasheet Preview

SM98A Datasheet

Backside Absolute Pressure Sensor

No Preview Available !

SM98A Series www.si-micro.com
ABSOLUTE MAXIMUM RATINGS
All parameters are specified at VSUPPLY = 5.00 V supply at 25oC, unless otherwise noted.
No.
Characteristic
Symbol Minimum Typical Maximum Units
1
Supply Voltage
VSUPPLY
-
-
6
V
2
Supply Current
ISUPPLY
-
-
2.0b
mA
3
Operating Temperature (a)
TOP
-45
-
+150
°C
4
Storage Temperature (a)
TSTG
-55
-
+150
°C
Notes:
a. Tested on a sample basis
b. Voltage must not exceed 6 V under any operating conditions. Values in this datasheet were determined for constant-voltage operation.
No. Product Number
Operating Pressure
Proof Pressure
(PPROOF)(a, b)
Burst Pressure
(BBURST)(a, c)
5 SM98A-H-XD-010B-XXXXX
0 to 10 bar (145 PSI)
20 bar (290 PSI)
150 bar (2175 PSI)
6 SM98A-H-XD-020B-XXXXX
0 to 20 bar (290 PSI)
40 bar (580 PSI)
200 bar (2900 PSI)d
7 SM98A-H-XD-050B-XXXXX
0 to 50 bar (725 PSI)
TBD
TBD
Notes:
a. Tested on a sample basis.
b. Proof pressure is defined as the maximum pressure the device can be subjected to and still perform within specification after returning
to specified operating conditions
c. Burst pressure is defined as the pressure at which the catastrophic failure results in fluid leaking through the device. These values
were determined for devices using epoxy die attach. Eutectic bond strength may be lower than burst pressure strength.
d. Actual value to be determined
Silicon Microstructures, Inc. 2001-2017. All rights reserved
DOC # 40DS9801.07
+1-(408) 577-0100 | sales@si-micro.com I www.si-micro.com
Page 2



Part Number SM98A
Description Backside Absolute Pressure Sensor
Maker Silicon Microstructures
Total Page 3 Pages
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