SM98A Overview
The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only es in contact with silicon materials. Therefore, the electronic structures on the front side of the die will not be affected during operation. This results in a durable pressure sensor suitable for challenging
SM98A Key Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
- On-Board temperature sensing diode
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- Backside metal option for eutectic bonding
- 80 Millivolt output at 5V
- All-silicon construction
- 50 Bar version in development