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SM98A - Backside Absolute Pressure Sensor

Datasheet Summary

Description

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

The SM98A is designed for harsh media where absolute pressure needs to be accurately measured.

In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials.

Features

  • Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
  • On-Board temperature sensing diode.
  • Small die (1.2 mm x 1.33 mm).
  • Backside entry for harsh environments.
  • Backside metal option for eutectic bonding.
  • 80 Millivolt output at 5V.
  • All-silicon construction.
  • 50 Bar version in development.

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Datasheet preview – SM98A

Datasheet Details

Part number SM98A
Manufacturer Silicon Microstructures
File Size 481.71 KB
Description Backside Absolute Pressure Sensor
Datasheet download datasheet SM98A Datasheet
Additional preview pages of the SM98A datasheet.

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Full PDF Text Transcription

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SM98A Harsh Media Backside Absolute Pressure Series SM98A Series FEATURES • Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA) • On-Board temperature sensing diode • Small die (1.2 mm x 1.33 mm) • Backside entry for harsh environments • Backside metal option for eutectic bonding • 80 Millivolt output at 5V • All-silicon construction • 50 Bar version in development TYPICAL APPLICATIONS • Selective catalytic reduction (SCR) • Oil Pressure • Automotive transmission • Automotive exhaust gas • TMAP • Truck tire pressure • Medical fluid or gas pressure sensing Silicon Microstructures, Inc. 2001-2017. All rights reserved DOC # 40DS9801.07 DESCRIPTION The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.
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