Part number:
MFC2000
Manufacturer:
MEMSIC
File Size:
420.07 KB
Description:
High performance bi-directional digital mems gas flow sensor.
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing.
It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy.
The sensing element is monolithically integrated with CMOS signal processing circuitry and
MFC2000 Features
* Bi-directional flow (±30 or ±70SLM)
* High dynamic range
* ±3% m.v. accuracy
* ±0.8% m.v. repeatability
* Low power consumption
* Fast response time
* Single 2.7 - 5.5Vdc power supply
* Digital I2C output
* Standard push-in fitting sizes
* Custom fluid conne
Datasheet Details
MFC2000
MEMSIC
420.07 KB
High performance bi-directional digital mems gas flow sensor.
📁 Related Datasheet
📌 All Tags