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MFC2000

High Performance Bi-Directional Digital MEMS Gas Flow Sensor

MFC2000 Features

* Bi-directional flow (±30 or ±70SLM)

* High dynamic range

* ±3% m.v. accuracy

* ±0.8% m.v. repeatability

* Low power consumption

* Fast response time

* Single 2.7 - 5.5Vdc power supply

* Digital I2C output

* Standard push-in fitting sizes

* Custom fluid conne

MFC2000 General Description

MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and.

MFC2000 Datasheet (420.07 KB)

Preview of MFC2000 PDF

Datasheet Details

Part number:

MFC2000

Manufacturer:

MEMSIC

File Size:

420.07 KB

Description:

High performance bi-directional digital mems gas flow sensor.

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MFC2000 High Performance Bi-Directional Digital MEMS Gas Flow Sensor MEMSIC

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