MFC2030, MFC2000 Datasheet - MEMSIC

MFC2030 - High Performance Bi-Directional Digital MEMS Gas Flow Sensor

MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing. It can measure up to 70 SLM bi-directional flow rate with +/3.0% accuracy. The sensing element is monolithically integrated with CMOS signal processing circuitry and.

MFC2030 Features

* Bi-directional flow (±30 or ±70SLM)

* High dynamic range

* ±3% m.v. accuracy

* ±0.8% m.v. repeatability

* Low power consumption

* Fast response time

* Single 2.7 - 5.5Vdc power supply

* Digital I2C output

* Standard push-in fitting sizes

* Custom fluid conne

MFC2000-MEMSIC.pdf