Description
High Performance Bi-Directional Digital MEMS Gas Flow Sensor .
MFC2000 series is a new gas flow sensing module platform based on ACEINNA’s proprietary CMOS technology for thermal mass flow sensing.
Features
* Bi-directional flow (±30 or ±70SLM)
* High dynamic range
* ±3% m. v. accuracy
* ±0.8% m. v. repeatability
* Low power consumption
* Fast response time
* Single 2.7 - 5.5Vdc power supply
* Digital I2C output
* Standard push-in fitting sizes
* Custom fluid conne
Applications
* Medical gas flow measurement and control
* Industrial gas flow measurement and control
