A5L2.2-6400 Datasheet (Mirrorcle) - Dual-Axis Quasi-static MEMS Mirror

A5L2.2-6400, Dual-Axis Quasi-static MEMS Mirror

Dual-Axis Quasi-static MEMS Mirror Datasheet A5L2.2-6400(AL/AU) GENERAL OVERVIEW Mirrorcle Technologies Gimbal-Less Dual-Axis Quasi-static MEMS Mirrors are based on proprietary design and fabrication technology.

They provide fast optical beam steering across two axes, while requiring ultra-low power.

The mirrors deflect laser beams or images to optical scanning angles of up to ±16° on each axis.

Compared to large-scale galvanometer-based optical scanners, these devices require several orders of

A5L2.2-6400 Features

*  Dual-Axis Gimbal-less MEMS Mirror  6.4mm diameter round mirror (clear aperture)  Optically flat, Aluminum or Gold coated  ±1.2° Mechanical Tip-Tilt on Two Axes  Electro-static Actuation  Ultra-low power consumption  Highest Point-to-Point Precision  High robustness and reliability  Wide op