A5L3.3-5000 Datasheet - Mirrorcle

A5L3.3-5000 Dual-Axis Quasi-static MEMS Mirror

PRELIMINARY PRELIMINARY Dual-Axis Quasi-static MEMS Mirror Datasheet A5L3.3-5000(AL/AU) GENERAL OVERVIEW Mirrorcle Technologies Gimbal-Less Dual-Axis Quasi-static MEMS Mirrors are based on proprietary design and fabrication technology. They provide fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±16° on each axis. Compared to large-scale galvanometer-based optical scanners, these devices.

A5L3.3-5000 Features

*  Dual-Axis Gimbal-less MEMS Mirror  5.0mm diameter round mirror (clear aperture)  Optically flat, Aluminum or Gold coated  ±2.5° Mechanical Tip-Tilt Rotation on Two Axes  Electro-static Actuation  Ultra-low power consumption  Highest Point-to-Point Precision  High robustness and reliability

A5L3.3-5000-Mirrorcle.pdf