SM7221 Datasheet - Silicon Microstructures

SM7221 Gauge & Differential Pressure Sensor

The SM7221, SM7321 & SM7421 series is a digital, low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SO.

SM7221 Features

* Pressure ranges from 0.15 to 0.29 psi; gauge, differential and asymmetric outputs

* Accuracy: ±1% full scale

* 14-bit digital, pressure calibrated and temperature compensated output

* I2C Digital Interface

* Compensated temperature range: -20 to 85oC

SM7221-SiliconMicrostructures.pdf