SM7331 Datasheet - Silicon Microstructures

SM7331 Gauge and Differential Pressure Sensor

The SM7X31 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a Digital output, fully conditioned, multi-order pressure and temperature compensated outputs. This series provides JEDEC standard SOI.

SM7331 Features

* Pressure range from 0.07 to 0.29 psi; gauge, differential or asymmetric differential outputs

* Digital Accuracy: +/- 1 %FS

* 16-bit digital, pressure calibrated and temperature compensated output

* I2C interface

* Compensated temperature range: -20 to 85°C

SM7331 Datasheet (905.20 KB)