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SM97A - Absolute Pressure Sensor

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Datasheet Details

Part number	SM97A
Manufacturer	Silicon Microstructures
File Size	639.83 KB
Description	Absolute Pressure Sensor
Datasheet	SM97A-SiliconMicrostructures.pdf

SM97A Product details

Description

The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
Support up to 25 times FS Burst Pressure.
Integrated temperature sensor.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
90 Millivolt output at 5 V.
All-silicon construction.
Backside metal for eutectic bonding is available as an option.
Proprietary design for enhanced proof & burst pressure robustness.

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Published: Aug 21, 2020 |