SM97A Absolute Pressure Sensor

Description

SM97A Harsh Media Backside Absolute Pressure Series SM97A Series .
The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip.

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Datasheet Specifications

Part number: SM97A
Manufacturer: Silicon Microstructures
File Size: 639.83 KB
Datasheet: SM97A-SiliconMicrostructures.pdf
Description: Absolute Pressure Sensor

Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
* Support up to 25 times FS Burst Pressure
* Integrated temperature sensor
* Small die (1.2 mm x 1.33 mm)
* Backside entry for harsh environments
* 90 Millivolt output at 5 V
* All-silicon

Applications

* This device is available in a full-scale range of 10 Bar and 20 Bar absolute (145 and 290 PSIA) and is ideal for OEM and highvolume applications. Provided in die form, these sensors can be mounted on ceramic or PC board substrates as part of an OEM system. They also may be packaged into proprietar

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SM97A Absolute Pressure Sensor Silicon Microstructures

Silicon Microstructures SM97A-like datasheet