SM97A Datasheet - Silicon Microstructures

SM97A Absolute Pressure Sensor

The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electron.

SM97A Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)

* Support up to 25 times FS Burst Pressure

* Integrated temperature sensor

* Small die (1.2 mm x 1.33 mm)

* Backside entry for harsh environments

* 90 Millivolt output at 5 V

* All-silicon

SM97A Datasheet (639.83 KB)

SM97A Datasheet Preview — Preview of SM97A PDF

Datasheet Details

Part number:

SM97A

Manufacturer:

Silicon Microstructures

File Size:

639.83 KB

Description:

Absolute pressure sensor.

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SM97A Absolute Pressure Sensor Silicon Microstructures

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