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SM98A - Backside Absolute Pressure Sensor

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Datasheet Details

Part number	SM98A
Manufacturer	Silicon Microstructures
File Size	481.71 KB
Description	Backside Absolute Pressure Sensor
Datasheet	SM98A-SiliconMicrostructures.pdf

SM98A Product details

Description

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

Features

Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA).
On-Board temperature sensing diode.
Small die (1.2 mm x 1.33 mm).
Backside entry for harsh environments.
Backside metal option for eutectic bonding.
80 Millivolt output at 5V.
All-silicon construction.
50 Bar version in development.

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Published: Aug 21, 2020 |