SM98A Datasheet - Silicon Microstructures

SM98A Backside Absolute Pressure Sensor

The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM98A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only comes in contact with silicon materials. Therefore, the electron.

SM98A Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)

* On-Board temperature sensing diode

* Small die (1.2 mm x 1.33 mm)

* Backside entry for harsh environments

* Backside metal option for eutectic bonding

* 80 Millivolt output at 5V

* All-si

SM98A Datasheet (481.71 KB)

SM98A Datasheet Preview — Preview of SM98A PDF

Datasheet Details

Part number:

SM98A

Manufacturer:

Silicon Microstructures

File Size:

481.71 KB

Description:

Backside absolute pressure sensor.

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SM98A Backside Absolute Pressure Sensor Silicon Microstructures

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