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SM98A Backside Absolute Pressure Sensor

SM98A Description

SM98A Harsh Media Backside Absolute Pressure Series SM98A Series .
The SM98A is a silicon micro-machined, piezoresistive pressuresensing chip.

SM98A Features

* Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
* On-Board temperature sensing diode
* Small die (1.2 mm x 1.33 mm)
* Backside entry for harsh environments
* Backside metal option for eutectic bonding
* 80 Millivolt output at 5V
* All-si

SM98A Applications

* Selective catalytic reduction (SCR)
* Oil Pressure
* Automotive transmission
* Automotive exhaust gas
* TMAP
* Truck tire pressure
* Medical fluid or gas pressure sensing Silicon Microstructures, Inc. 2001-2017. All rights reserved DOC # 40DS

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Datasheet Details

Part number
SM98A
Manufacturer
Silicon Microstructures
File Size
481.71 KB
Datasheet
SM98A-SiliconMicrostructures.pdf
Description
Backside Absolute Pressure Sensor

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Silicon Microstructures SM98A-like datasheet