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MS7212-A2 - Hermetic Pressure Sensor Die

General Description

The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side.

A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap.

Key Features

  • Media resistive pressure sensor die.
  • Output Span 150 mV @ 5 V.
  • Temperature Range -40 °C … + 150 °C.
  • Linearity 0.05.

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Datasheet Details

Part number MS7212-A2
Manufacturer Measurement
File Size 190.20 KB
Description Hermetic Pressure Sensor Die
Datasheet download datasheet MS7212-A2 Datasheet

Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

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PRELIMINARY MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pressure sensor • Hermetic sensor, temperature up to 150°C • Pads on one side • For harsh environment • RoHS-compatible & Pb-free1 DESCRIPTION The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside.