The following content is an automatically extracted verbatim text
from the original manufacturer datasheet and is provided for reference purposes only.
View original datasheet text
PRELIMINARY
MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar)
• 0 to 1200 kPa range (12 bar or 174 PSI)
• Absolute pressure sensor • Hermetic sensor, temperature up to 150°C
• Pads on one side
• For harsh environment • RoHS-compatible & Pb-free1
DESCRIPTION
The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled glass is bonded on the backside.