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MS7212-A2 Datasheet Hermetic Pressure Sensor Die

Manufacturer: Measurement

Overview: PRELIMINARY MS7212-A2 Hermetic Pressure Sensor Die (0-12 bar) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pressure sensor • Hermetic sensor, temperature up to 150°C • Pads on one side • For harsh environment •.

Datasheet Details

Part number MS7212-A2
Manufacturer Measurement
File Size 190.20 KB
Description Hermetic Pressure Sensor Die
Datasheet MS7212-A2-Measurement.pdf

General Description

The MS7212-A2 is an absolute silicon micro-machined pressure sensor for harsh environment, with the pads on one side.

A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a glass cap.

The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane.

Key Features

  • Media resistive pressure sensor die.
  • Output Span 150 mV @ 5 V.
  • Temperature Range -40 °C … + 150 °C.
  • Linearity 0.05.

MS7212-A2 Distributor