MS7212 - PRESSURE SENSOR DIE

Measurement

General Description

The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment.

A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap.

Key Features

Media resistive pressure sensor die.
Output Span 150mV @ 5 V.
Temperature Range -40°…+125°C.
Linearity 0.05% (typical).
Die Size 1.63 x 1.95 mm2.
Low Cost, High reliability.

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MS7212 pressure sensor die by Measurement - Datasheet Preview

Datasheet Details

Part number	MS7212
Manufacturer	Measurement
File Size	223.46 KB
Description	PRESSURE SENSOR DIE
Datasheet	MS7212 Datasheet

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Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

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MS7212 PRESSURE SENSOR DIE (0-12 BAR) FOR HARSH ENVIRONMENT • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute pressure sensors • Hermetic sensor • RoHS-compatible & Pb-free1 DESCRIPTION The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.