MS7212
MS7212 is PRESSURE SENSOR DIE manufactured by Measurement.
DESCRIPTION
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. To improve the sensor stability, a drilled Pyrex™ is bonded on the backside. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.
FEATURES
- Media resistive pressure sensor die
- Output Span 150m V @ 5 V
- Temperature Range -40°…+125°C
- Linearity 0.05% (typical)
- Die Size 1.63 x 1.95 mm2
- Low Cost, High reliability
APPLICATION
- Harsh...
