Measurement MS7212
The MS7212 is an absolute silicon micro-machined pressure sensor for harsh environment. The pressure, applied on the backside, is converted in electrical signal by piezo-resistors implanted in the silicon membrane. As the pressure port consists of Pyrex™ and silicon, both stable in most of the chemicals, the MS7212 is suitable for media-resistive applications.DESCRIPTION
A vacuum reference cavity is sealed on top of the sensitive silicon membrane by the anodic bonding of a Pyrex™ cap. To improve the sensor stability, a drilled Pyrex™ is bonded on the backside.FEATURES
● Media resistive pressure sensor die● Output Span 150mV @ 5 V
● Temperature Range -40°…+125°C
● Linearity 0.05% (typical)
● Die Size 1.63 x 1.95 mm2
● Low Cost, High reliability APPLICATION
● Harsh envir