A7M10.2-1000AL Datasheet | Mirrorcle

PRELIMINARY PRELIMINARY Dual-Axis Quasi-static MEMS Mirror Datasheet OVERVIEW Mirrorcle Technologies Gimbal-Less Dual-Axis Quasi-static MEMS Mirrors are based on proprietary design and fabrication technology. They provide fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±16° on each axis. pared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tip-tilt rotation dissipates less than 1m W of power. Mirrorcle Technologies MEMS Mirrors are made entirely of monolithic Single-Crystal Silicon (SCS), resulting in excellent repeatability and reliability. Flat, smooth mirror surfaces are coated with a thin film of metal with high broadband reflectance. MODULAR DESIGN Mirrorcle actuators lend themselves inherently to a modular design approach. Each actuator can utilize electrostatic rotators of arbitrary length, arbitrarily stiff linkages, and arbitrarily positioned mechanical rotation transformers. In addition, the device can have an arbitrarily large mirror diameter. This modularity easily allows the devices to be customized for any application requirement. Due to this design flexibility and a wide variety of applications that require beam steering, with widely different specifications, we provide many types of gimbal-less two-axis quasi-static actuator designs. With over 20 major design series and manufacturing generations, multiple sub-generations of design tuning for a specific customer or set of specifications, the plete list of working designs has over 100 device types. Several of the designs are in series production. Features  Dual-Axis Gimbal-less MEMS Mirror  1mm diameter round mirror (clear aperture)  Optically flat, Aluminum or Gold coated  ±5° Mechanical Tip-Tilt Rotation on Two Axes...