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A7M20.2-2000AL - Dual-Axis Quasi-static MEMS Mirror

Features

  •  Dual-Axis Gimbal-less MEMS Mirror  2mm diameter round mirror (clear aperture)  Optically flat, Aluminum or Gold coated  ±5° Mechanical Tip-Tilt Rotation on Two Axes  Electro-static Actuation  Ultra-low power consumption  Highest Point-to-Point Precision  High robustness and reliability  Wide operating temperature range  Window options for visible and IR wavelengths.

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Datasheet Details

Part number A7M20.2-2000AL
Manufacturer Mirrorcle
File Size 951.81 KB
Description Dual-Axis Quasi-static MEMS Mirror
Datasheet download datasheet A7M20.2-2000AL Datasheet
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Dual-Axis Quasi-static MEMS Mirror Datasheet A7M20.2-2000AL OVERVIEW Mirrorcle Technologies Gimbal-Less Dual-Axis Quasi-static MEMS Mirrors are based on proprietary design and fabrication technology. They provide fast optical beam steering across two axes, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±16° on each axis. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tip-tilt rotation dissipates less than 1mW of power. Mirrorcle Technologies MEMS Mirrors are made entirely of monolithic Single-Crystal Silicon (SCS), resulting in excellent repeatability and reliability.
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