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SM5291 Datasheet Gauge and Differential Pressure Sensor

Manufacturer: Silicon Microstructures

Overview: Low Pressure Digital & Analog Sensor SM5291, SM5391, SM5491 Gauge and Differential Pressure.

Datasheet Details

Part number SM5291
Manufacturer Silicon Microstructures
File Size 953.58 KB
Description Gauge and Differential Pressure Sensor
Download SM5291 Download (PDF)

General Description

The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.

This series provides JEDEC standard SOIC-16 package with a dual vertical or horizontal ports options.

It is available in gauge, differential, asymmetric differential configurations.

Key Features

  • Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs.
  • Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS.
  • 16-bit digital, pressure calibrated and temperature compensated output.
  • I2C and analog Output interface available.
  • Compensated temperature range: -20 to 85°C.
  • Robust JEDEC SOIC-16 package for automated assembly.
  • Manufactured according to ISO9001 and ISO/TS 16949 standards Combining t.