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Ultra-Low Pressure Digital Sensor
SM9233/SM9235/SM9236 Series Gauge Pressure Sensors
FEATURES
• Pressure ranges: 250 up to 600 Pa Gauge • Accuracy after Autozero: < 1%FS • 16 bit I2C Digital interface • Pressure calibrated and temperature compensated output • Compensated temperature range: -20 to 85oC
DESCRIPTION
The SM923x series are digital, ultra-low pressure sensors offering state-of-the-art MEMS pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option. It is available in a gauge pressure configuration.
The total accuracy after board mount and system level autozero is less than 1%FS.