SM97A Description
The SM97A is a silicon micro-machined, piezoresistive pressuresensing chip. The SM97A is designed for harsh media where absolute pressure needs to be accurately measured. In contrast to traditional pressure-sensing chips the media only es in contact with silicon materials.
SM97A Key Features
- Pressure Range: 10 Bar (145 PSIA), 20 Bar (290 PSIA)
- Support up to 25 times FS Burst Pressure
- Integrated temperature sensor
- Small die (1.2 mm x 1.33 mm)
- Backside entry for harsh environments
- 90 Millivolt output at 5 V
- All-silicon construction
- Backside metal for eutectic bonding is available as an option
- Proprietary design for enhanced proof & burst pressure robustness