SM5291 Datasheet - Silicon Microstructures

SM5291 Gauge and Differential Pressure Sensor

The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs. This series provides JEDEC sta.

SM5291 Features

* Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs

* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS

* 16-bit digital, pressure calibrated and temperature compensated output

* I2C and analog Output interface availab

SM5291-SiliconMicrostructures.pdf