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SM5391, SM5291 Gauge and Differential Pressure Sensor

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Description

Low Pressure Digital & Analog Sensor SM5291, SM5391, SM5491 Gauge and Differential Pressure Sensor .
The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing techno.

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This datasheet PDF includes multiple part numbers: SM5391, SM5291. Please refer to the document for exact specifications by model.
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Datasheet Specifications

Part number
SM5391, SM5291
Manufacturer
Silicon Microstructures
File Size
953.58 KB
Datasheet
SM5291-SiliconMicrostructures.pdf
Description
Gauge and Differential Pressure Sensor
Note
This datasheet PDF includes multiple part numbers: SM5391, SM5291.
Please refer to the document for exact specifications by model.

Features

* Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs
* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
* 16-bit digital, pressure calibrated and temperature compensated output
* I2C and analog Output interface availab

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Silicon Microstructures SM5391-like datasheet