Description
The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.
Features
- Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs.
- Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS.
- 16-bit digital, pressure calibrated and temperature
compensated output.
- I2C and analog Output interface available.
- Compensated temperature range: -20 to 85°C.
- Robust JEDEC SOIC-16 package for automated assembly.
- Manufactured according to ISO9001 and ISO/TS 16949
standards
Combining t.
SM5291-SiliconMicrostructures.pdf