SM5291-SiliconMicrostructures.pdf
Datasheet Details
Part number:
SM5391, SM5291
Manufacturer:
Silicon Microstructures
File Size:
953.58 KB
Description:
Gauge and differential pressure sensor.
Note:
This datasheet PDF includes multiple part numbers: SM5391, SM5291.
Please refer to the document for exact specifications by model.
SM5391, SM5291, Gauge and Differential Pressure Sensor
The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.
This series provides JEDEC sta
SM5391 Features
* Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs
* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS
* 16-bit digital, pressure calibrated and temperature compensated output
* I2C and analog Output interface availab
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