SM5420C - Pressure Sensor
0.0030 All dimensions in inches MSL = 3 Note: 0.0393 0.1023 0.0326 0.1098 87 65 0.0299 12 34 0.1023±0.051 0.1023 0.0393 0.0326 0.09173 0.1688±0.051 0.07874 0.06220 Gnd 87 65 0.0299 12 34 ‐Sig +Sig +Vexc Silicon Microstructures Warranty and Disclaimer: