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SM5491, SM5291 Datasheet - Silicon Microstructures

SM5291-SiliconMicrostructures.pdf

This datasheet PDF includes multiple part numbers: SM5491, SM5291. Please refer to the document for exact specifications by model.
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Datasheet Details

Part number:

SM5491, SM5291

Manufacturer:

Silicon Microstructures

File Size:

953.58 KB

Description:

Gauge and differential pressure sensor.

Note:

This datasheet PDF includes multiple part numbers: SM5491, SM5291.
Please refer to the document for exact specifications by model.

SM5491, SM5291, Gauge and Differential Pressure Sensor

The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.

This series provides JEDEC sta

SM5491 Features

* Pressure range from 0.8 to 2.49 psi; gauge, differential or asymmetric differential outputs

* Digital Accuracy: +/- 1 %FS; Analog Accuracy: +/- 1.5 %FS

* 16-bit digital, pressure calibrated and temperature compensated output

* I2C and analog Output interface availab

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