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SM5491, SM5291 - Gauge and Differential Pressure Sensor

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This datasheet PDF includes multiple part numbers: SM5491, SM5291. Please refer to the document for exact specifications by model.
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Datasheet Details

Part number SM5491, SM5291
Manufacturer Silicon Microstructures
File Size 953.58 KB
Description Gauge and Differential Pressure Sensor
Datasheet download datasheet SM5291-SiliconMicrostructures.pdf
Note This datasheet PDF includes multiple part numbers: SM5491, SM5291.
Please refer to the document for exact specifications by model.

SM5491 Product details

Description

The SM5X91 series are a low pressure MEMS sensor family offers state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital & analog output, fully conditioned, multi-order pressure and temperature compensated outputs.

Features

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