Intersema MS7901
the MS7901 consists of a silicon micro-machined membrane. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.| Part No. | MS7901 |
|---|---|
| Datasheet | MS7901 Download |
| Manufacturer | Intersema |
| Description | PRESSURE SENSOR DIE |
| Buy | Stock & Price |
DESCRIPTION
The sensor element of Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7901-A_0.2) or 0.5 mm (MS7901-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7901-D) and the other without Pyrex glass (MS7901-S).FEATURES
● Uncompensated pressure sensor die● Output span 150mV @ 5V
● Temperature range -40°…+125°C
● Linearity 0.05% (typical)
● Very small die size 1.78 x 1.78 mm (MS7901-A)
● Low cost, high reliability APPLICATION
● Absolute pressure sensor systems
● Differential/gauge pressure sensor systems
● Barometers, altimeters
● Variometers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ / EPI Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ Out- Out+ : Positive output GND1 : Ground GND2 : Ground R5+...
