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MS7902 Datasheet PDF

Intersema MS7902

the MS7902 consists of a silicon micro-machined membrane. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane.
Part No. MS7902
Datasheet MS7902 Download
Manufacturer Intersema
Description PRESSURE SENSOR DIE
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MS7902 datasheet page 1 preview

DESCRIPTION

The sensor element of Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7902-A_0.2) or 0.5 mm (MS7902-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7902-D) and the other without Pyrex glass (MS7902-S).

FEATURES

● Uncompensated pressure sensor die
● Output span 150mV @ 5V
● Temperature range -40°…+125°C
● Linearity 0.05% (typical)
● Very small die size 1.72 x 1.58 mm (MS7902-A)
● Low cost, high reliability APPLICATION
● Absolute pressure sensor systems
● Differential/gauge pressure sensor systems
● Engine controls
● Dive computers ELECTRICAL CONNECTIONS Positive output for pressure applied topside Vs+ EPI Out+ Out- Vs+ : Supply voltage of Wheatstone bridge Epi : Connection of epitaxial layer (membrane) Out- : Negative output Out+ : Positive output GND1 : Ground GND2 : Ground GND1 GND2...
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