MS7902 - PRESSURE SENSOR DIE

General Description

The sensor element of the MS7902 consists of a silicon micro-machined membrane.

Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.

Key Features

Uncompensated pressure sensor die.
Output span 150mV @ 5V.
Temperature range -40°…+125°C.
Linearity 0.05% (typical).
Very small die size 1.72 x 1.58 mm (MS7902-A).
Low cost, high reliability.

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MS7902 pressure sensor die by Intersema - Datasheet Preview

Datasheet Details

Part number	MS7902
Manufacturer	Intersema
File Size	215.17 KB
Description	PRESSURE SENSOR DIE
Datasheet	MS7902 Datasheet

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Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

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MS7902 PRESSURE SENSOR DIE (0-2 BAR) • 0 to 200 kPa range (2 bar or 29 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7902 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7902-A_0.2) or 0.5 mm (MS7902-A_0.5).