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KXTC9-2050 - Tri-axis Analog Accelerometer

Datasheet Summary

Description

The KXTC9-2050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s).

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

Features

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Datasheet preview – KXTC9-2050

Datasheet Details

Part number KXTC9-2050
Manufacturer Kionix
File Size 527.58 KB
Description Tri-axis Analog Accelerometer
Datasheet download datasheet KXTC9-2050 Datasheet
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Full PDF Text Transcription

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± 2g Tri-axis Analog Accelerometer Specifications PART NUMBER: KXTC9-2050 Rev. 2 Feb-2015 Product Description The KXTC9-2050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.
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