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KXTF9-1026 - Tri-axis Digital Accelerometer

General Description

The KXTF9 is a tri-axis +/-2g, +/-4g or +/-8g silicon micromachined accelerometer with integrated orientation, tap/double tap, and activity detecting algorithms.

The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology.

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Datasheet Details

Part number KXTF9-1026
Manufacturer Kionix
File Size 943.94 KB
Description Tri-axis Digital Accelerometer
Datasheet download datasheet KXTF9-1026 Datasheet

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± 2g / 4g / 8g Tri-axis Digital Accelerometer Specifications PART NUMBER: KXTF9-1026 Rev. 6 Jun-2011 Product Description The KXTF9 is a tri-axis +/-2g, +/-4g or +/-8g silicon micromachined accelerometer with integrated orientation, tap/double tap, and activity detecting algorithms. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit.