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A9R8.1-800DAL - Single Axis Resonant Integrated MEMS Mirrors

Features

  •  Single-axis Resonant Integrated MEMS Mirror  0.8mm, 1.2mm, 1.4mm diameter mirrors  Flat, Aluminum-coated mirror  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window options for visible and IR wavelengths.

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Datasheet Details

Part number A9R8.1-800DAL
Manufacturer Mirrorcle
File Size 872.38 KB
Description Single Axis Resonant Integrated MEMS Mirrors
Datasheet download datasheet A9R8.1-800DAL Datasheet

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Full PDF Text Transcription (Reference)

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Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology. They provide fast optical beam steering, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±18°. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tilt rotation dissipates less than 1mW of power. Mirrorcle Technologies MEMS Mirrors are made entirely of monolithic Single-Crystal Silicon (SCS), resulting in excellent repeatability and reliability.
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