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A9R14.1-1400DAL - Single Axis Resonant Integrated MEMS Mirrors

Download the A9R14.1-1400DAL datasheet PDF. This datasheet also covers the A9R8.1-800DAL variant, as both devices belong to the same single axis resonant integrated mems mirrors family and are provided as variant models within a single manufacturer datasheet.

Features

  •  Single-axis Resonant Integrated MEMS Mirror  0.8mm, 1.2mm, 1.4mm diameter mirrors  Flat, Aluminum-coated mirror  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window options for visible and IR wavelengths.

📥 Download Datasheet

Note: The manufacturer provides a single datasheet file (A9R8.1-800DAL-Mirrorcle.pdf) that lists specifications for multiple related part numbers.

Datasheet Details

Part number A9R14.1-1400DAL
Manufacturer Mirrorcle
File Size 872.38 KB
Description Single Axis Resonant Integrated MEMS Mirrors
Datasheet download datasheet A9R14.1-1400DAL Datasheet

📁 Similar Datasheet

Part Number Description Manufacturer

Other Datasheets by Mirrorcle

Part Number Description
A9R12.1-1200DAL Single Axis Resonant Integrated MEMS Mirrors
A9R8.1-800DAL Single Axis Resonant Integrated MEMS Mirrors
A9RB.1-1600 Single Axis Resonant Bonded MEMS Mirrors
A9RB.1-2000 Single Axis Resonant Bonded MEMS Mirrors
A9RB.1-2400 Single Axis Resonant Bonded MEMS Mirrors

Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

View original datasheet text
Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology. They provide fast optical beam steering, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±18°. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tilt rotation dissipates less than 1mW of power. Mirrorcle Technologies MEMS Mirrors are made entirely of monolithic Single-Crystal Silicon (SCS), resulting in excellent repeatability and reliability.
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