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A9RB.1-1600 - Single Axis Resonant Bonded MEMS Mirrors

Features

  •  Single-axis Resonant Bonded MEMS Mirror  1.6mm to 2.4mm diameter mirrors  Optically flat, Aluminum or Gold coated  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window options for visible and IR wavelengths.

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Datasheet Details

Part number A9RB.1-1600
Manufacturer Mirrorcle
File Size 872.01 KB
Description Single Axis Resonant Bonded MEMS Mirrors
Datasheet download datasheet A9RB.1-1600 Datasheet

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Full PDF Text Transcription (Reference)

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PRELIMINARY PRELIMINARY Single Axis Resonant Bonded MEMS Mirrors Datasheet A9RB Series: A9RB.1-1600, A9RB.1-2000, A9RB.1-2400 OVERVIEW Mirrorcle Technologies Single-Axis Resonant Bonded MEMS Mirrors are based on proprietary fabrication technology. They provide fast optical beam steering, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±18°. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude less driving power: continuous operation of the electro-static actuators that drive the mirror tilt rotation dissipates less than 1mW of power.
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