Full PDF Text Transcription for AWM90000 (Reference)
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AWM90000 Series Mass flow sensor for gases FEATURES · Ranges 0...±200 sccm1 or 0...±2 "H2O (0...±5 mbar) · Bidirectional sensing · Actual mass flow sensing · Low differen...
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bar) · Bidirectional sensing · Actual mass flow sensing · Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 Power consumption Temperature limits Operating Storage Mechanical shock ELECTRICAL CONNECTION 8 to 15 V typ. 10 ±0.01 V 50 mW -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage 12345678 December 2007 / 592 1/6 www.sensortechnics.