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AWM90000 - Mass flow sensor

Features

  • Ranges 0±200 sccm1 or 0±2 "H2O (0±5 mbar).
  • Bidirectional sensing.
  • Actual mass flow sensing.
  • Low differential pressure sensing.

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Datasheet preview – AWM90000

Datasheet Details

Part number AWM90000
Manufacturer SENSORTECHNICS
File Size 157.60 KB
Description Mass flow sensor
Datasheet download datasheet AWM90000 Datasheet
Additional preview pages of the AWM90000 datasheet.

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Full PDF Text Transcription

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AWM90000 Series Mass flow sensor for gases FEATURES · Ranges 0...±200 sccm1 or 0...±2 "H2O (0...±5 mbar) · Bidirectional sensing · Actual mass flow sensing · Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS Maximum ratings Supply voltage2 Power consumption Temperature limits Operating Storage Mechanical shock ELECTRICAL CONNECTION 8 to 15 V typ. 10 ±0.01 V 50 mW -25 to 85°C -40 to 90°C 100 g (5 drops, 6 axes) Note: 1 sccm denotes standard cubic centimeters per minute 2 Output voltage is ratiometric to supply voltage 12345678 December 2007 / 592 1/6 www.sensortechnics.
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