Description
TriQuint's TQP13-N process is a unique, low-cost 150mm wafer, optical lithography 0.13um pHEMT process used for low noise and medium power applications in Ku-band through V-band applications.
Features
- 0.13 um pHEMT (TQP13-N) Process Cross-section.
- Low cost Optical Lithography 0.13um Gate High Ft, ~95 GHz
TQP13-N
Low Noise, < 0.5 dB in Ku-band Interconnects: 2 layers (1 Airbridge & 1 local) High Value MIM Capacitor Resistors.
- Thin film resistor.
- Epi resistor
0.13 um pHEMT Device Cross-Section.
- Backside Vias High Volume 150 mm Wafers Same Baseline as Mass Production Today
General Desc.
TQP13-N Datasheet
