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MS7912 Datasheet Preview

MS7912 Datasheet

PRESSURE SENSOR DIE

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MS7912 pdf
MS7912
PRESSURE SENSOR DIE (0-12 BAR)
0 to 1200 kPa range (12 bar or 174 PSI)
Absolute/differential pressure sensors
High linearity, small size
RoHS-compatible & Pb-free1
DESCRIPTION
The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass
mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure
sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential
sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
FEATURES
Uncompensated pressure sensor die
Output Span 150mV @ 5V
Temperature Range -40°…+125°C
Linearity 0.05% (typical)
Small Die Size 1.72 x 1.58mm
Low Cost, High reliability
APPLICATION
For absolute or differential pressure sensor systems
Engine controls
Dive computers
ELECTRICAL CONNECTIONS
Positive output for pressure applied topside
Vs+ EPI
Out+
Out-
GND1 GND2
Vs+ : Supply voltage of Wheatstone bridge
Epi : Connection of epitaxial layer (membrane)
Out- : Negative output
Out+ : Positive output
GND1 : Ground
GND2 : Ground
1 The European RoHS directive 2002/95/EC (Restriction of the use of certain Hazardous Substances in electrical and electronic equipment)
bans the use of lead, mercury, cadmium, hexavalent chromium and polybrominated biphenyls (PBB) or polybrominated diphenyl ethers
(PBDE).
DA7912_003.doc
00007912636
ECN 743
May 05th, 2005
1/4



Intersema
Intersema

MS7912 Datasheet Preview

MS7912 Datasheet

PRESSURE SENSOR DIE

No Preview Available !

MS7912 pdf
PAD OUT
Vs+
Epi Out-
Out+
LAYOUT
GND1 GND2
MS7912A
Important remarks:
As the sensing elements are diffused resistances, the voltage
applied on the ground pads (GND1 and GND2) has to be lower
than the voltage applied on supply voltage pad (Vs+).
The epitaxial layer is connected to the Vs+ pin on the die
MS7912D
Bondable area = 100 x 100 um
Bondable area = 100 x 100 um
DA7912_003.doc
00007912636
ECN 743
May 05th, 2005
2/4


Part Number MS7912
Description PRESSURE SENSOR DIE
Maker Intersema
Total Page 4 Pages
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