MS7912 Description
The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor.
MS7912 Key Features
- Unpensated pressure sensor die
- Output Span 150mV @ 5V
- Temperature Range -40°…+125°C
- Linearity 0.05% (typical)
- Small Die Size 1.72 x 1.58mm
- Low Cost, High reliability
- For absolute or differential pressure sensor systems
- Engine controls
- Dive puters