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MS7912 - PRESSURE SENSOR DIE

Description

The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum.

Implanted resistors make use of the piezo-resistive effect.

Features

  • Uncompensated pressure sensor die.
  • Output Span 150mV @ 5V.
  • Temperature Range -40°…+125°C.
  • Linearity 0.05% (typical).
  • Small Die Size 1.72 x 1.58mm.
  • Low Cost, High reliability.

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Datasheet preview – MS7912

Datasheet Details

Part number MS7912
Manufacturer Intersema
File Size 253.42 KB
Description PRESSURE SENSOR DIE
Datasheet download datasheet MS7912 Datasheet
Additional preview pages of the MS7912 datasheet.

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Full PDF Text Transcription

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MS7912 PRESSURE SENSOR DIE (0-12 BAR) • 0 to 1200 kPa range (12 bar or 174 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7912 consists of a small silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7912D) has a hole in the Pyrex glass at the backside of the sensor. FEATURES • Uncompensated pressure sensor die • Output Span 150mV @ 5V • Temperature Range -40°…+125°C • Linearity 0.05% (typical) • Small Die Size 1.72 x 1.
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