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MS7970 - PRESSURE SENSOR DIE

Description

The sensor element of the MS7970 consists of a silicon micro-machined membrane.

Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.

Features

  • Uncompensated pressure sensor die.
  • Output span 310mV @ 5V.
  • Temperature range -40°…+125°C.
  • Linearity 0.25% (typical).
  • Very small die size 1.72 x 1.58 mm (MS7970-A).
  • Low cost, high reliability.

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Datasheet preview – MS7970

Datasheet Details

Part number MS7970
Manufacturer Intersema
File Size 215.03 KB
Description PRESSURE SENSOR DIE
Datasheet download datasheet MS7970 Datasheet
Additional preview pages of the MS7970 datasheet.

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Full PDF Text Transcription

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MS7970 PRESSURE SENSOR DIE (0-70 BAR) • 0 to 7000 kPa range (70 bar or 1015 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7970 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5).
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