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MS761 Datasheet - Intersema

MS761 PRESSURE SENSOR DIE

The sensor element of the MS761A consists of a silicon micro-machined membrane with a Pyrex glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS761-A) carries a sealed vacuum reference cavity underneath the membrane whereas the dif.

MS761-Intersema.pdf

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Datasheet Details

Part number:

MS761

Manufacturer:

Intersema

File Size:

240.19 KB

Description:

Pressure sensor die.

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MS761 MS761 PRESSURE SENSOR DIE Intersema

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