MS7930 - PRESSURE SENSOR DIE

General Description

The sensor element of the MS7930 consists of a silicon micro-machined membrane.

Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal.

Key Features

Uncompensated pressure sensor die.
Output span 150mV @ 5V.
Temperature range -40°…+125°C.
Linearity 0.05% (typical).
Very small die size 1.72 x 1.58 mm (MS7930-A).
Low cost, high reliability.

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MS7930 pressure sensor die by Intersema - Datasheet Preview

Datasheet Details

Part number	MS7930
Manufacturer	Intersema
File Size	215.32 KB
Description	PRESSURE SENSOR DIE
Datasheet	MS7930 Datasheet

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Other Datasheets by Intersema

Part Number	Description
MS79005	PRESSURE SENSOR DIE
MS7901	PRESSURE SENSOR DIE
MS7902	PRESSURE SENSOR DIE
MS7904	PRESSURE SENSOR DIE
MS7905	PRESSURE SENSOR DIE

Full PDF Text Transcription (Reference)

The following content is an automatically extracted verbatim text from the original manufacturer datasheet and is provided for reference purposes only.

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MS7930 PRESSURE SENSOR DIE (0-30 BAR) • 0 to 3000 kPa range (30 bar or 435 PSI) • Absolute/differential pressure sensors • High linearity, small size • RoHS-compatible & Pb-free1 DESCRIPTION The sensor element of the MS7930 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7930-A_0.2) or 0.5 mm (MS7930-A_0.5).