ADXRS622 Datasheet (Analog Devices)

ADXRS622, Yaw Rate Gyroscope

The ADXRS622 is a complete angular rate sensor (gyroscope) that uses the Analog Devices, Inc., surface-micromachining process to make a functionally complete and low cost angular rate sensor, integrated with all of the required electronics on one chip.

The manufacturing technique for this device is

ADXRS622 Features

* Complete rate gyroscope on a single chip Z-axis (yaw rate) response High vibration rejection over wide frequency 2000 g powered shock survivability Ratiometric to referenced supply 5 V single-supply operation 105°C operation Self-test on digital command Ultrasmall and light: