A9RB.1-1600 Datasheet (Mirrorcle) - Single Axis Resonant Bonded MEMS Mirrors

A9RB.1-1600, Single Axis Resonant Bonded MEMS Mirrors

PRELIMINARY PRELIMINARY Single Axis Resonant Bonded MEMS Mirrors Datasheet A9RB Series: A9RB.1-1600, A9RB.1-2000, A9RB.1-2400 OVERVIEW Mirrorcle Technologies Single-Axis Resonant Bonded MEMS Mirrors are based on proprietary fabrication technology.

They provide fast optical beam steering, while requiring ultra-low power.

The mirrors deflect laser beams or images to optical scanning angles of up to ±18°.

Compared to large-scale galvanometer-based optical scanners, these devices require several

A9RB.1-1600 Features

*  Single-axis Resonant Bonded MEMS Mirror  1.6mm to 2.4mm diameter mirrors  Optically flat, Aluminum or Gold coated  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window opt