A9R8.1-800DAL Datasheet - Mirrorcle

A9R8.1-800DAL Single Axis Resonant Integrated MEMS Mirrors

Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies Single-Axis Resonant MEMS Mirrors are based on proprietary fabrication technology. They provide fast optical beam steering, while requiring ultra-low power. The mirrors deflect laser beams or images to optical scanning angles of up to ±18°. Compared to large-scale galvanometer-based optical scanners, these devices require several orders of magnitude.

A9R8.1-800DAL Features

*  Single-axis Resonant Integrated MEMS Mirror  0.8mm, 1.2mm, 1.4mm diameter mirrors  Flat, Aluminum-coated mirror  ±8.5° Mechanical (Resonant Only) Rotation  Electro-static Actuation  Ultra-low power consumption  High robustness and reliability  Wide operating temperature range  Window optio

A9R8.1-800DAL-Mirrorcle.pdf