Description
Single Axis Resonant Integrated MEMS Mirrors Datasheet A9R Series: A9R8.1-800DAL, A9R12.1-1200DAL, A9R14.1-1400DAL OVERVIEW Mirrorcle Technologies S.
Features
* Single-axis Resonant Integrated MEMS
Mirror 0.8mm, 1.2mm, 1.4mm diameter mirrors Flat, Aluminum-coated mirror ±8.5° Mechanical (Resonant Only) Rotation Electro-static Actuation Ultra-low power consumption High robustness and reliability Wide operating temperature range Window optio
Applications
* with widely different specifications, we provide many types of gimballess two-axis actuator designs. Single-axis devices are in some cases based on dual-axis devices with only the X-axis activated in assembly. However single-axis resonant devices are a specialized category with very stiff small actu